Emissions cleaning equipment, ESCAPE INLINE Series, ESCAPE MODULE Series, DAS

In December 2000, MKK concluded an exclusive contract with DAS (Germany) for the manufacture and sale of DAS’s semiconductor plant emissions cleaning equipment ESCAPE INLINE Series in Japan.
MKK presented Mitsubishi-DAS ESCAPE Module series having Backup module for 300mm silicon wafer fab at ‘Semicon Japan 2003’ in Dec. 2003. And MKK has received many inquiries of ESCAPE Module series from silicon wafer fabs since then. Actually, some equipments of ESCAPE Module series are delivered to big leading semiconductor foundries and they are smoothly running.
The ESCAPE Series is uniquely designed to scrub harmful deposition gas and global warming-induced cleaning (PFC) gas from semiconductor plants through simultaneous direct exposure to flames. This equipment is simple and compact, with a water scrubber to cool, clean and neutralize emissions in addition to the combustion reactor.

1. Deposition and PFC gases are directly exposed to flames from ring burners for oxidation, reduction and pyrolysis, in order to be scrubbed.
2. The equipment is ready to operate immediately after the burners are fired on receiving an input command signal from the control panel and needs no pre/standby burning by the combustion reactor. In addition, a unique combustion algorithm is used to maintain fuel gas at the optimum quantity for each type of gas to be treated. Therefore, fuel gas consumption can be reduced.
3. Either alkali water circulation or fresh water scrubbing can be selected for the gas treatment. Alkali water circulation is more economical in terms of water consumption (more than 20%).
4. Self-cleaning system (scraper + compressed air discharge), solids recovery pot, etc. for removing and discharging fine particles generated as various reaction by-products are provided to prevent blockage and lengthen the maintenance cycle.
5. A hardware interlock system equipped with sensors that constantly monitor all combustion/scrubbing factors such as chamber pressure, fuel gas, scrubbing water, temperature, etc. is provided to ensure stable and safe operation of the equipment.
6. Graphic touch panel enables easy selection of operating conditions. Also, a user-friendly interface is provided for monitoring the equipment status. Software is available for a central control network system that enables multiple equipment monitoring and control from one location.
7. The equipment measures 830 mm wide by 675 mm deep by 2050 mm high and weighs 360 kg. The footprint of the equipment is the smallest of all combustion type scrubbing equipment.
8. The simple and unique design of the combustion chamber and water scrubbing section allow removal and installation of the combustion reactor without any special jigs immediately after the equipment is stopped. This enables quick cleaning and replacement of the combustion chamber, ensuring high uptime.

The ESCAPE Series is available as an extensive product line to meet various emission treatment requirements.

1. The combination of some modules of Mitsubishi-DAS ESCAPE Module series flexibly adapts to the emission volume between 300slm to 1200sml.
2. The backup module supports 100% capacity operating rate of CDV and etcher.
3. The backup module doesn’t need the utility at all on standby.

MKK is an exclusively agent and a technical partner of DAS in Japan only.
More details, please inquire of DAS in Dresden, Germany.